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An effective approach for identifying defective critical. – Most defect signatures on wafers are caused by faulty tools. If these defects are not captured by in-line inspection tools or sampled during Defect Review-SEM, they are carried over multiple processing steps and discovered at the end of the fabrication procedure. Wafers with different defect signatures discovered at the end of the fabrication procedure are, most often, processed through same.
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Time-Traveling Dropout Rules ‘Fictional Universe’ – His father mysteriously disappeared from the space-time continuum soon after discovering time-travel. I don’t need silicon wafers with a slightly neurotic interface to tell me that. That would be.
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US7186298B2 – Wafer support system – Google Patents – FIG. 2 is a cross-sectional view through one embodiment of a wafer support system of the present invention; FIG. 2 a is a detailed view of one embodiment of a wafer spacer in the form of a pin; FIG. 2 b is a detailed view of an alternative wafer spacer in the form of a sphere; FIG. 3 is an exploded view of the wafer support system illustrated in FIG. 2;
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